This chapter discusses vibration isolation of STM and AFM. First, the basic concepts of vibration isolation are illustrated by a one-dimensional system using elementary mechanics. The source of vibration, the environmental vibration, its characteristics, and methods of measurement are presented. The importance of vibration isolation at the laboratory foundation level and the proper mechanical design of STM and AFM are then discussed. The focus of this chapter in on the most important vibration isolation system: two-stage suspension spring with eddy-current damping. A detailed analysis of the two-stage spring system as well as aspects of practical design is presented. The principles and design charts for eddy-current damping system are discussed. Finally, the commercial pneumatic vibration isolation system is briefly discussed.
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