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Molecular Beam Epitaxy – A Short History - Oxford Scholarship Online
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Molecular Beam Epitaxy: A Short History

John Orton and Tom Foxon


This book describes the development of MBE from its origins in the 1960s through to the present day. It begins with a short historical account of other methods of crystal growth, both bulk and epitaxial, to set the subject in context, emphasising the wide range of semiconductor materials employed. This is followed by an introduction to molecular beams and their use in the Stern–Gerlach experiment and the development of the microwave MASER. The first applications to semiconductor science were in studies of the nucleation of silicon by the thermal decomposition of silane and that of GaAs from be ... More

Keywords: MBE, semiconductors, molecular beams, III-V compounds, II-VI compounds, IV-VI compounds, Si-SiGe, low-dimensional structures, electronic devices, optical devices

Bibliographic Information

Print publication date: 2015 Print ISBN-13: 9780199695829
Published to Oxford Scholarship Online: August 2015 DOI:10.1093/acprof:oso/9780199695829.001.0001


Affiliations are at time of print publication.

John Orton, author
Professor, University of Nottingham

Tom Foxon, author
Professor, University of Notthingham